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前驅(qū)體材料

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    艾佩科（上海）氣體有限公司
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      前驅(qū)體材料 Precursor material
金屬有機(jī)類
英文名 化學(xué)式 CAS號(hào) 別名 中文名
Trimethyl Aluminum C3H9Al 75-24-1 TMA 三甲基鋁
Diethylzinc Zn(C2H5)2 557-20-0 DEZ 二乙基鋅
Dimethylzinc Zn(CH3)3 544-97-8 DMZ 二甲基鋅
Trimethylgallium Ga(CH3)3 1445-79-0 TMG 三甲基鎵
Triethylgallium Ga(C2H5)3 1115-99-7 TEG 三乙基鎵
Trimethylindium C3H9In 3385-78-2 TMI 三甲基銦
Trimethylbismuth (CH3)3Bi 593-91-9 TMB 三甲基鉍
Trimethyl antimony Sb(CH3)3 594-10-5 TMSb  三甲基銻 
Antimony triethy Sb(C2H5)3 617-85-6  TESb  三乙基銻 
Diethylberyllium Be(C2H5)2 542-63-2 DEB 二乙基鈹
Di-t-butyltelluride PhTeMgBr  83817-35-0  DTBT  二叔丁基碲 
Diethvl tellurium Te(C2H5)2  627-54-3  TETe  二乙基碲 
Diisopropyltellurium C6H14Te  51112-72-2  DipTe  二異丙基碲 
Tris(dimethylamido)gallium(III) Ga(N(CH3)2)3  57731-40-5  TDMAG  三（二甲氨基）鎵 
Tris(dimethylamido)antimony(III) C6H18N3Sb 7289-92-1  TDMASb  三（二甲胺）銻 
Tetrakis(diethylamion)hafnium  C8H24HfN4   19962-11-9  TDMAH  四（二甲胺）鉿 
Ethanamine, N-methyl-,hafnium(4+) salt (4:1) C12H32HfN4 352535-01-4 TEMAH 四（甲乙胺）鉿 
N-methyl-N-[tris(dimethylamino)germyl]methanamine C8H24GaN4 7344-40-3 TDMAGe  四（二甲胺）鍺 
Tetrakis(dimethylamino)zirconium C8H24N4Zr 19756-04-8  TDMAZ  四（二甲胺）鋯 
Tetrakis(ethylmethylamino)zirconium C12H32N4Zr 175923-04-3  TEMAZ  四（甲乙胺）鋯 
N-methyl-N-[tris(dimethylamino)stannyl]methanamine  C8H24N4Sn  1066-77-9  TDMASn  四（二甲胺）錫 
Tetrakis(dimethylamino)titanium  C8H24N4Ti   3275-24-9  TDMAT  四（二甲胺）鈦 
Ethyl(methyl)azanide,titanium(4+) C12H32N4Ti 308103-54-0 TEMAT  四（甲乙胺）鈦 
Tetrakis(ethylmethylamino)vanadium C12H32N4V 791114-66-4 TEMAV  四（甲乙胺）釩 
Tantalum(5+) ethanolate C10H30O5Ta 6074-84-6 PETOTa 乙氧基鉭
Pentakis(dimethylamino)tantalum(V) C10H30N5Ta 19824-59-0  PDMATa 五（二甲胺）鉭
Ferrocene C10H10Fe 102-54-5 FeCp2 二茂鐵 
Magnesocene C10H10Mg 1284-72-6 MgCp2 二茂鎂
Manganocene C10H10Mn 73138-26-8 MnCp2 二茂錳 
Nickelocene C10H10Ni  1271-28-9  NiCp2 二茂鎳 
Ruthenocene C10H10Ru  1287-13-4  RuCp2 二茂釕 
Cobaltocene (η5-C5H5)2Co 1277-43-6 CoCp2 二茂鈷
bis(methylcyclopentadienyl)magnesium C12H14Mg 40672-08-0 Mg(MeCp)2 二甲基二茂鎂 
Bis(ethylcyclopentadienyl)magnesium C14H18Mg 114460-02-5 Mg(EtCp)2 二乙基二茂鎂 
1,1'-Diethylmanganocene C14H18Mn 101923-26-6 Mn(EtCp)2  二乙基二茂錳 
Bis(ethylcyclopentadienyl)ruthenium C7H9RuC7H9 32992-96-4 Ru(EtCp)2 二乙基二茂釕 
(Trimethyl)methylcyclopentadienylplatinum(IV) C9H16Pt 94442-22-5 (MeCp)Pt(CH3)3 三甲基甲基環(huán)戊二烯基鉑 
Lithium Dipivaloylmethanate C11H19LiO2 22441-13-0 Li(thd)  （四甲基庚二酮）鋰 
(2,2,6,6-Tetramethyl-3,5-heptanedionato)silver C11H19AgO2 79827-25-1  Ag(thd) （四甲基庚二酮）銀 
Copper(II) hexafluoroacetylacetonate hydrate Cu(C5HF6O2)2 155640-85-0   Cu(hfac)2 二（六氟戊二酮）銅 
Palladium(II)hexafluoro-2,4-pentanedionate C10H8F18O4Pd 64916-48-9 Pd(hfac)2 二（六氟乙酰丙酮）鈀
Iridium(III)2,4-pentanedionate C15H21IrO6 15635-87-7 Ir(acac)3  三（乙酰丙酮）銥 
Neodymium-thd C33H60NdO6 15492-47-4 Nd(thd)3 三（四甲基庚二酮）釹
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III) C33H57O6Yb 15492-52-1 Yb(thd)3 三（四甲基庚二酮）鐿
Tetrakis(tetramethylheptanedionato)cerium C22H38CeO4  18960-54-8 Ce(thd)4 四（四甲基庚二酮）鈰
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)  C33H57LaO6  14319-13-2 La（thd）3 三（四甲基庚二酮）鑭 
Tris(tetramethylcyclopentadienyl)lanthanum  C27H39La 148607-23-2 La(MeCp)3 甲基環(huán)戊二烯鑭
Bis(trimethylsilyl)azanide,lanthanum(3+) C18H54LaN3Si6 175923-07-6 La(TMSA)3 三(二(三甲硅)胺)鑭
Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionate  C22H38O4Pb  21319-43-7 Pb(thd)2  二（四甲基庚二酮）鉛 
Bismuth III Tetramethylheptanedionate C33H57BiO6 142617-53-6 Bi(thd)3  三（四甲基庚二酮）鉍 
Erbium-DPM C33H57ErO6 34750-80-6 Er(thd)3  三（四甲基庚二酮）鉺 
Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)  C33H57O6Y  15632-39-0 Y(thd)3 三（四甲基庚二酮）釔 
Bis(N,N'-di-i-propylacetamidinato)cobalt(II) (C8H17N2)2Co 635680-58-9 Co(iPr-MeAMD)2 二（N,N’-二異丙基乙脒基）鈷
Bis(N,N'-diisopropylacetamidinato) Nickel (II) (C8H17N2)2Ni 635680-62-5 Ni(iPr-MeAMD)2 二（N,N’-二異丙基乙脒基）鎳
lanthanum tris(N,N'-diisopropylacetamidinate) (C8H17N2)3La 635680-72-7 La(iPr-MeAMD)3 三（N,N’-二異丙基乙脒基）鑭
Yttrium tris(N,N'-diisopropylacetamidinate) (C8H17N2)3Y 　 Y(iPr-MeAMD)3 三（N,N’-二異丙基乙脒基）釔
Molybdenum hexacarbonyl Mo(CO)6 13939-06-5 Mo(CO)6 六羰基鉬
(Trimethyl)methylcyclopentadienylplatinum (IV) C9H16Pt 94442-22-5 Me3Pt(MeCp) 三甲基甲基環(huán)戊二烯鉑
Tris(methylcyclopentadienyl)yttrium(III) C18H21Y 329735-72-0 Y(MeCp)3 甲基環(huán)戊二烯釔
Indium,(h5-2,4-cyclopentadien-1-yl)- C5H5In  34822-89-4 InCp 環(huán)戊二烯基銦 
Tin(IV) chloride Cl4Sn  7646-78-8  Cl4Sn 四氯化錫 
Titanium(IV) isopropoxide C12H28O4Ti  546-68-9 TIPT  四異丙醇鈦
Niohium pentaethnxidc Nb(OC2H5)5 3236-82-6 PETONb 乙氧基鈮
Lithium t-butoxide C4H9LiO 1907-33-1 TBOLi 叔丁醇鋰 
Iron t-butoxide C12H27FeO3 620945-29-1 3TBOFe 叔丁醇鐵
GALLIUM (III) ISOPROPOXIDE C9H21GaO3  4452-61-3 TPGa 三異丙氧基鎵
Titanium tetrachloride TiCl4 7550-45-0 TiCl4 四氯化鈦
Carbon tetrachloride CCl4 56-23-5 CCl4 四氯化碳
Carbon tetrabromide CBr4 558-13-4 CBr4 四溴化碳
Pentachloropyridine  C5Cl5N 2176-62-7 PCP 五氯吡啶
boride compound B compound 　 AMY-B-330 硼化合物
Germanium(Ⅳ) methoxide C4H12GeO4 992-91-6 　 甲氧基鍺

硅基化合物
英文名 化學(xué)式 CAS號(hào) 別名 中文名
Bis(t-butylamino)silane  ([NH(C4H9)]2SiH2) 186598-40-3 BTBAS 雙(叔丁基氨基)硅烷
Tris(dimethylamino)silane C6H19N3Si 15112-89-7  3DMAS 三（二甲氨基）硅烷
N,N-Disilylsilanamine H9NSi3 13862-16-3 TSA (N,N-二硅烷基-硅烷胺)
Bis(diethylamino)silane C8H22N2Si 27804-64-4 BDEAS(SAM24) 雙（二乙胺基）硅烷
Diisopropylaminosilane C6H17NSi 908831-34-5 DIPAS(LTO-520) 二（異丙氨基）硅烷
Tetraethyl Orthosilicate C8H22N2Si 1978/10/4 TEOS 原硅酸乙酯
Hexachlorodisilane Si2Cl6 13465-77-5 HCDS 六氯乙硅烷
Bis(trimethylsilyl)azanide,gadolinium(3+) C18H54GdN3Si6 35789-03-8 Gd(TMSA)3 三(二(三甲硅)胺)釓 

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